Hitachi High-Tech Launches the GT2000, High-Precision Electron Beam Metrology System to Meet the Needs of Semiconductor Devices Development and Mass Production in the High-NA EUV Generation
TOKYO, Dec 12, 2023 – (JCN Newswire via SeaPRwire.com) – Hitachi High-Tech Corporation (“Hitachi High-Tech”) announced today the launch of its GT2000 high-precision electron beam metrology system. GT2000 uses Hitachi High-Tech’s …